|
The following A3 standard measurement blocks have default
geometry measurement column names:
TH TS ST VT FD LK SF EF SR ER FF T1 T2 T3 T4 T5 CG CJ CT
IDENTIFICATION-FIELDS (A2 STANDARD 1) :
|
|
1) Grid Location (4characters - xxyy)
|
|
2) Wafer Number
|
|
3) Chip Code
|
|
4) Date of Measurement (MM/DD/YY)
|
|
5) Measurement Station
|
|
6) Device Type
|
|
7) Lot Number
|
|
8) (optional) extra fields
|
|
ex).ID 0101 3471 3251CI 12/01/75 PHAAD1 INPUT 1203
IDENTIFICATION-FIELDS (A3 STANDARD 2) :
|
|
A3-format .ID fields are:
|
|
1) Technology Identification Code
|
|
2) Lot Number
|
|
3) Wafer Number
|
|
4) Tester Name;(optional) Device Within Tester
|
|
5) Grid Location
|
|
6) Ambient Temperature
|
|
7) Date of Measurement
|
|
8) Time of Measurement
|
|
ex).ID MOS0P35 12251 12 XNSHORT X3Y3 25 04/05/94 09:24
|